Digital hot plate WAFERPLATE™

for laboratory liquids

Large circular milled-flat aluminum surface with temperature uniformity better than 1% across the heating surface. Designed specifically for working with 12” (304.8mm) diameter or smaller silicon wafers and other samples where temperature accuracy and surface uniformity are a must. Description The Torrey Pines Scientific WaferPlate™ Programmable Bake Plate is a fully programmable digital hot plate designed specifically for baking silicon wafers. In manual operation simply set a target temperature and the unit will go to and hold that exact temperature to within ± 1 °C. In the programmable mode routines can be stored in memory for instant recall and use. The stored routine will be run automatically, and exactly the same, again and again. Programs can be simple or complex depending upon need. Multiple temperatures, temperature ramp rates if wanted, and dwell times can be stored. These programs can be written and stored in the remote controller provided with the unit, or the programs can be as simple or complex as needed when written by the user on a PC and run by that PC via the RS-232 I/O port on the rear of the heater. Features 13.875 in (354.24 mm) diameter heater surface Milled flat plate aluminum ideal for 12 in (304.8 mm) or smaller silicon wafers Controllable remotely from a PC or industrial controller via RS232 I/O port or via the Remote Controller Provided with full access to all parameters or data Bench top controllable and programmable using the remote controller provided Temperature range from room temperature to 350 °C Readable and settable to 1 °C Accuracy 1% of setting