L13E series Ф131 ultra-high throughput filter cartridges are specifically designed for the wet processing applications in TFT-LCD manufacturing, such as substrate cleaning, etching, stripping and DI water flushing. The filters are available in various materials and wide range of removal ratings, with their unique construction and high filtration area, resulting in reduced change-out and operating costs. They have excellent compatibility with the various process liquids, capable of 200L/min required for G6-10 process.
Features and Benefits
● Available in various materials and removal ratings
● High filtration area and long service life
● High flow rates and low pressure drop
● Reduced filtration operating costs
Quality
● Cartridges produced in a controlled environment
● Manufactured according to ISO9001 certified Quality Management System