Low-pressure plasma surface cleaning system Femto

semi-automaticmedical

The Femto plasma systems can be combined in different variants in a modular manner. Below, please find an overview over the most common options using the Femto plasma systems. Femto plasma systems are primarily used in the following sectors: Analytics, archaeology, automotive, research and development departments, semiconductor technology, small-series manufacture, plastics technology, medical engineering, micro-system engineering, sensory technology, sterilising, textile technology. Basic equipment The housings vary depending on the components / options Chamber volume: depending on the version, 1.9 to 6 litres Voltage supply: 230 V for table units, 400 V / 3 phases for stand-alone units Vacuum chambers Stainless steel round with cover (approx. ∅ 100 mm, L 278 mm or L 600 mm) Stainless steel rectangular, hinged door (approx. W 103 x D 285 x H 103) Aluminium rectangular, hinged door (approx. ∅ 103 mm x 103 mm, L 280 mm or L 600 mm) Quartz glass (UHP) round with lid or with hinged door (approx. ∅ 95 mm, L 280 mm or L 600 mm) Borosilicate glass (UHP) round with lid or with hinged door (approx. ∅ 95 mm, L 280 mm or L 600 mm) Charge Product carrier (optional: water-cooled) Quartz glass boats Rotary drum for powder Rotary drum for bulk goods Aluminium plate Stainless steel plate Borosilicate glass Silica glass Electrodes Single- or multi-tier RIE Controls Semi-automatic Rotary switch PCCE control (Microsoft Windows CE) PC control (Windows 10 IoT) Pressure measurement Pirani Capacity pressure gauge (for corrosive gas version) Timer Digital