spectroscopic ellipsometer

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spectroscopic ellipsometer spectroscopic ellipsometer - UVISEL Plus


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The Reference Ellipsometer for Thin Film Measurements

The UVISEL Plus ellipsometer offers the best combination of modularity and performance for advanced thin film, surface and interface characterization.

The new UVISEL Plus includes the newest acquisition technology designed to measure faster and more accurately than ever. FastAcq, the newest acquisition technology, is based on double modulation, designed for real world thin film characterization. Based on a new electronic, data processing and high speed monochromator, the new FastAcq technology enables a sample measurement from 190 to 2100nm to be completed within 3 minutes, at high resolution.

Based on phase modulation technology, the UVISEL Plus ellipsometer provides a powerful optical design to continuously cover the spectral range from 190 to 2100 nm. High quality data are delivered across the whole spectral range in terms of high accuracy, high resolution measurements and excellent signal to noise ratio.

The phase modulation technology characterizes polarization changes at high frequency (50 kHz), and without any mechanical movement. It results in:

High accuracy measurements for all values of (Ψ,Δ)
Excellent signal/noise ratio from the FUV to NIR
Very fast data acquisition speed at up to 50 ms/point ideal for kinetic studies and in-situ real-time measurements