Innovative Specimen Preparation Method for TEM / STEM / SEM / EPMA / AUGER
The Ion Slicer can prepare thin-film specimens without solvents or chemicals and requires no prior treatment of the specimen other than rectangular slicing (no disc grinding or dimple grinding).
The Ion Slicer prepares thin-film specimens faster and easier than conventional preparation tools. A low-energy, low-angle Ar ion beam irradiates the specimen while a thin shield belt allows low-angle irradiation of the Ar ion beam (from 0° to 6°), drastically reducing ion-beam irradiation damage to the specimen. The result is a high-quality thin film with few sputtering artifacts--even in soft materials. The Ion Slicer can efficiently prepare thin films from specimens having different compositions, even those having porous composites.
High quality TEM pre-treatment
No complicated pre-treatments
Minimal surface damage
Ion accelerating voltage1 to 8kV
Tilt angleUp to 6°(0.1°step)
Milling rate5m/min (8 kV, silicon)
Gas for beam irradiationArgon
Recommended specimen size2.8mm (in length)0.5 mm (in width) 0.1mm (in thickness)
Pressure measurementPenning gauge
Main evacuation systemTurbo-molecular pump
CCD camera Built-in