JSM-7200F has much higher spatial resolution than the conventional models at both high and low accelerating voltages by applying the technology used for “In-Lens SchottkyPlus”, the electron optics equipped on our flagship-model, JSM-7800FPRIME, and by incorporating TTLS (Through-The-Lens System). The maximum probe current of 300 nA is also guaranteed because of the above mentioned features. Thus, JSM-7200F is a next-generation multi-purpose FE-SEM that has capability of high resolution observation, high throughput analysis, ease of use, and expandability.
The main features of JSM-7200F are “In-Lens SchottkyPlus” technology-based electron optics, GB (Gentle Beam mode), TTLS (Through-The-Lens System) that enables high resolution observation at low accelerating voltage and control the amount of low-energy signals to be detected by the upper detectors, and a hybrid objective lens that combines magnetic-lens and electrostatic-lens.
In-Lens Schottky Electron Gun
The In-Lens Schottky electron gun (JEOL patented) has been developed by optimizing the geometry of the electron gun and the low-aberration condenser lens. By this unique technology the electrons emitted from the electron gun can be utilized efficiently than the conventional one, so smaller-diameter of electron probe even with large current is possible. Thus, JSM-7200F is capable of high throughput analysis (EDS, WDS, EBSD, etc.).
TTLS (through-the-lens system) is a system that enables high resolution observation at low accelerating voltage and also selection of different signals generated from the specimen by using GB (Gentle Beam mode).