It is a high specification Auger electron spectrometer with a hemispherical analyzer to provide high throughput analysis of the chemical bonding state at nano to micro areas, and a field emission electron gun also used for EPMA, because it can deliver a large, stable electric current The highly precise eucentric specimen stage makes it possible to perform the previously-impossible analysis of insulators. This in combination with the floating type ion gun offers the versatility to handle any specimen, such as metals and insulation materials, to obtain composition information to and chemical information.
Employing analyzers with variable energy resolution has made it possible to perform chemical bonding state analysis in a high-resolution mode, as well as high-speed mapping in a high-sensitivity mode.
Schottky Field Emission Electron Gun
An electron gun that achieves both image observation with 3nm spatial resolution, as well as high-throughput chemical bonding state analysis as a result of the large electric current of up to 200nA. This is possible by incorporating the electron optics technology that JEOL has developed over many years with the Schottky Field Emission Electron Guns employed in SEMs and EMPAs.
Eucentric Specimen Stage
The adoption of an eucentric stage, a necessity for an analysis device with multiple optics systems, provides highly accurate height center reproducibility. Freely-selectable tilting up to 90°makes difficult analysis of insulators possible.