laboratory thermostat / process / compact / without display
Semistat 1200, Semistat 2400, Semistat 4400
Min.: -20 °C (-4 °F)
Max.: 90 °C (194 °F)
Thermo-electric process thermostats for the semiconductor industry from -20 to 90 °C
The thermoelectric Semistat temperature control system offers reproducible temperature control for plasma etching applications. This system dynamically controls the temperature of the electrostatic wafer chuck (ESC) and can be used in all types of etching processes. The LAUDA Semistat thermoelectric temperature control systems are based on established principles of heat transfer used for Peltier elements. These elements allow quick and precise temperature control required for complex processes involved in the manufacture of components progressively getting smaller and smaller in size.