Get insights from anywhere in your ultra-clean environment with this purpose-built 10 nm condensation particle counter. Increase uptime and improve yield.
Ticked bullet point Monitor inside semiconductor process tools with the smallest form factor on the market
Ticked bullet point Uninterrupted, maintenance-free monitoring for 12 months with continuous 24/7 measurements.
Ticked bullet point Best false count rate of any CPC designed for ultraclean environment monitoring
Product Details
Reduce contamination and improve yield where it matters most with our revolutionary NanoAir™ 10 condensation particle counter (CPC).
Manifold Monitoring Available
This is the only manifold system designed to support nano particle transport and delivery.
A 10-port manifold companion product (ParticleSeeker™) supports applications that require multiple sample locations to be monitored in sequential or programmed sequences.
The 10-port manifold system allows for coverage of an entire EFEM/ Minienvironment with a single CPC. Achieve 120 square feet coverage with manifold system.
Port to port time as little as 0.1 second, with minimized cross talk. The manifold supports various modes of operation for:
tool qualification
track / process tracking
automated response to integrated fab events
wafer tracking inside process tools
83% Smaller Form Factor
Monitor anywhere in your clean environment, including inside semiconductor process tools and equipment front-end modules (EFEM) as this CPC is 83% smaller than competitor counters.
Easily Access Data
View, analyze and report on data quickly with our FacilityNet Particle Monitoring Software