The SolidSpec-3700i/3700i DUV have three detectors which cover the range from ultraviolet to near-infrared.
Features
High Sensitivity
High accuracy for transmittance and reflectance is required for the measurement of optical parts. The SolidSpec-3700i/3700i DUV have three detectors which cover the range from ultraviolet to near-infrared. The sensitivity in the near-infrared region is significantly enhanced by using both InGaAs and cooled PbS detectors. Highly accurate and highly sensitive spectra are obtainable from ultraviolet to near-infrared.High accuracy for transmittance and reflectance is required for the measurement of optical parts. The SolidSpec-3700i/3700i DUV have three detectors which cover the range from ultraviolet to near-infrared. The sensitivity in the near-infrared region is significantly enhanced by using both InGaAs and cooled PbS detectors. Highly accurate and highly sensitive spectra are obtainable from ultraviolet to near-infrared.
Conventional spectrophotometers have used a photomultiplier tube detector for the ultraviolet and visible region and a PbS detector for the near-infrared region. However, neither detector has much sensitivity near the detector switchover, preventing high sensitivity measurement in this range. The SolidSpec-3700i/3700i DUV make it possible to take high sensitivity measurements in the switchover range by using an InGaAs detector as shown in the figure on the left.
The development of precise laser machining using an ultraviolet laser such as an ArF excimer laser enhances the requirement for transmittance or reflectance measurements of optical parts in the deep ultraviolet region.