Clean room systems, available from the SHI Group, reduce running costs with the proprietary air conditioning system, "Cle-Eco®". Highly accurate control of temperature and humidity is also possible. Designs suitable for internal facilities at existing manufacturing plants and offices are also provided. Furthermore, in cases where the processing accuracy of nanometer orders is required by our customers, the SHI Group also offers precision temperature regulating equipment, Thermal Cube®.
Features of Thermal Cube®
Energy saving types requiring no electric heater, using our proprietary refrigerant reheating method, are also available.
2Accurate temperature regulation(*) is possible
The control of temperatures to ±0.5℃ and ±0.1℃, as well as the control of humidity to ±2% and ±5% in the normal temperature zone, is possible with standard systems.
The high accuracy types are capable of controls with an accuracy of ±0.05℃.
3Capable of handling various needs
A line of products that feature a diverse range of specifications, such as energy saving types, low humidity types and large air flow types, is available.
These systems can be used for a variety of applications. Furthermore, there is an integrated precision temperature regulating system, "Uni Thermal Cube", which features temperature control functions for the three fluid types of air, water and compressed air, packaged in a single housing.
4Examples of numerous applications
Partitions that cater to the required accuracies and facilities, such as simplified plastic curtain methods and thermal insulation panel methods, as well as equipment linked automatic shutter fitted types, can be provided.