SEM microscope / for life sciences applications / for biology / for the pharmaceutical industry
for life sciences applications, for biology, for the pharmaceutical industry, for environmental analysis
The MAIA3 is an ultra-high resolution SEM with excellent imaging capabilities in the whole range of beam energies.
A versatile detection system and high spatial resolution allows the observation of even the finest surface details. This is an essential feature for comprehensive characterisation of nanomaterials, for observation of beam-sensitive samples common in the semiconductor industry and for comfortable imaging of non-conductive samples including uncoated biological specimens.
Triglav™ - newly designed UHR electron column
TriLens™ objective system: unique combination of three-lens objective and crossover-free beam path
Advanced detection system with multiple SE and BSE detectors
TriSE™ and TriBE™
Triglav™ - Ultimate ultra-high resolution at low beam energy: 1 nm at 1 keV and 0.7 nm at 15 keV
EquiPower™ thermal power dissipation system for excellent electron column stability
Electron beam currents up to 400 nA and rapid beam energy changes
Optimised column geometry for accommodating large wafers up to 8”
Real-time In-Flight Beam Tracing™ for performance and beam optimization
Extended low-vacuum mode with chamber pressures up to 500 Pa for imaging non-conducting specimens
Triple BSE detection TriBE™ for angle-selective signal collection. The Mid-Angle BSE and In-Beam LE-BSE detectors are located inside the column and detect medium-angle and axial backscattered electrons, while the In-Chamber BSE Detector detects wide-angle electrons. Together, they deliver a variety of imaging contrasts and enable low-energy detection down to 200 eV.