Production systems

2 companies | 17 products
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production system
production system
FlexAL

The FlexAL atomic layer deposition (ALD) system offers a broad range of optimised high-quality plasma ALD and thermal ALD processes with maximum flexibility in precursors, processes gases, and hardware configuration within ...

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Oxford Instruments
production system
production system
PlasmaPro 100 Nano CVD

... °C or 1200°C table Sample sizes up to 200mm Vacuum load lock - Quick sample exchange Cold wall design with showerhead based uniform precursor delivery Optional liquid/solid source delivery system ...

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Oxford Instruments
production system
production system
PlasmaPro 100 Polaris

... clamp technology capable of clamping sapphire, GaN on sapphire and silicon High conductance pumping system Clusterable with other PlasmaPro systems Designed specifically for the harsh chemistries ...

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Oxford Instruments
production system
production system
PlasmaPro 800 PECVD

... (PECVD) processes on large wafer batches and 300mm wafers, in a compact footprint, open-loading system. The large wafer platen allows for production scale batch processing and 300mm ...

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Oxford Instruments
production system
production system
PlasmaPro 100 PECVD

... for photonics, dielectric layers, passivation and many other uses Hard mask deposition and etch for high brightness LED production Delivers reactive species to the substrate, with a uniform high conductance path through ...

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Oxford Instruments
production system
production system
PlasmaPro 800 RIE

... etching (RIE) processes on large wafer batches and 300mm wafers, in a compact footprint, open-loading system. The large wafer platen allows for production scale batch processing and 300mm ...

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Oxford Instruments
production system
production system
PlasmaPro 100 Estrelas

... diverse set of process requirements across the Micro Electro Mechanical Systems (MEMS), Advanced Packaging and Nanotechnology markets. Developed with both the research and production markets in mind, ...

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Oxford Instruments
production system
production system
PlasmaPro 100 Cobra

... up to 200mm. Our systems have a wide install base within high volume manufacturing (HVM), with well-developed process solutions. The PlasmaPro 100 Cobra supports a number of markets including, MEMS & sensors, GaAs ...

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Oxford Instruments
production system
production system
PlasmaPro 100 ALE

... devices. Specially designed for processes such as recess etching for GaN HEMT applications and nanoscale layer etching, the system's digital/cyclical etch process offers low damage, smooth surfaces. Digital/Cyclical ...

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Oxford Instruments
production system
production system
PlasmaPro 80 ICP

The PlasmaPro 80 ICP is a compact, small footprint system offering versatile ICP etch solutions with convenient open loading. It is easy to site and easy to use, with no compromise on process quality. The open load design ...

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Oxford Instruments
production system
production system
QbCon®

... processes for the pharmaceutical solids production, L.B. Bohle supplies comprehensive solutions for continuous manufacturing with a high development speed. The QbCon® continuous manufacturing systems ...