The JSM-IT800 employs a new easy to use GUI "SEM Center", that serves as a common platform that enables a full range of functionality from high resolution observation to high speed elemental mapping. This platform features a JEOL In-Lens Schottky Plus Field Emission Electron Gun, a next-generation electron optical control system "Neo Engine" and a fully embedded JEOL EDS system. Moreover, the system can satisfy various needs of users by utilizing an innovative hybrid design of SEM objective lens.
The JSM-IT800 has two versions based on the objective lens type: Hybrid Lens version (HL version) as general-purpose FE-SEM and Super Hybrid Lens version (SHL version) for observation and analysis at ultra low accelerating voltage and at highest resolution. A new UHD (Upper Hybrid Detector) is a standard detector for SHL version, and makes it possible to obtain image with significantly enhanced S/N allowing easy observation with high image fidelity.
In addition, new backscattered electron detectors, Scintillator Bacskattered Electron Detector (SBED) and Versatile Backscattered Electron Detector (VBED) can be incorporated.
SBED enables acquisition of material contrast image with excellent sensitivity at low accelerating voltage, while VBED can help to obtain images of 3D, topography and material contrasts by employing multiple detector segments.
In-Lens Schottky Plus Field Emission Election Gun (FEG)
The integrated In-Lens Schottky Plus and low aberration condenser lens achieves high beam brightness.In-Lens Schottky Plus Field Emission Election Gun (FEG)
The integrated In-Lens Schottky Plus and low aberration condenser lens achieves high beam brightness.