Wet process monitoring
Chemical process control
Bath monitoring
Particle level measurement in effervescent liquids
Product Details
Eliminates bubbles, ensures accurate particle measurement, and streamlines chemical process control for SEMI C1 compliant chemicals.
Reliable sampling of chemicals with dissolved gas
Batch sampling: Limits amount of sample collected reducing waste and cost of expensive chemicals.
Compression Sampling: Pressurizes the sample, taken from a container, to dissolve bubbles, reducing false particle counts in effervescent or gas-containing chemicals.
Compliance: Fully meets SEMI C1 standards for process chemical particle measurement, ensuring industry-standard accuracy.
Versatile with a wide application range
Handles a broad spectrum of corrosive liquids, including sulfuric acid, at temperatures up to 150 °C.
Supports multiple LiQuilaz® particle counters for size ranges from 0.2 µm to 20 µm, making it adaptable for semiconductor and chemical process monitoring.
User-Friendly Data Management
FacilityNet software simplifies online sampling with SPC charts, time plots, and sensor status.
SamplerSight software supports batch sampling, advanced data storage, retrieval, and report generation.