Prevent process failures and poor device performance with the Chem 20™ chemical particle counter.
Ticked bullet point Respond quickly to chemical changes
Ticked bullet point Reduce uncertainty with improved accuracy and reliability
Ticked bullet point Meet the International Roadmap for Devices and Systems (IRDS)
Product Details
Increase yield and reduce defects or product recalls by preventing process contamination. The Chem 20™ offers online and batch sample-based chemical monitoring from incoming QC to point of use.
20 nm Sensitivity
Reduce shutdown risks with earlier warnings of smaller changes and contamination. Also, lower downtime and investigations by decreasing false positive. This monitor overcomes background noise, increasing reliability of particle measurements.
Obtain Stable and Repeatable Data
Confidently control your processes while ensuring quality assurance with stable and repeatable data.
Laser Safety and Leak
Detection
Protects equipment, people and samples with leak detection alarms.
Sensing Bubbles and Handling Flow Reduction
Stop estimating particle concentrations. The Chem 20™ senses bubbles and reductions in sample flow to ensure accurate and reliable monitoring of samples for data integrity.