The 2821 MSP Turbo™ Vaporizer is our highest liquid flow rate unit. This model features 2400W of heater power and can be used to deliver flow rates up to 6000g/hr (TEOS or equivalent).
Product Details
Dimensions -
417 mm x 140 mm x 183 mm (16.4 in. x 5.5 in. x 7.2 in.)
Fittings (on the unit) -
Carrier Gas Inlet - 1/4 in. VCR female split nut
Liquid Inlet - 1/4 in. VCR female
Vapor Outlet - 1/2 in. VCR female
Compressed Air - 4 mm instant tube fitting
Wetted Parts - SS 316, FFKM, PTFE, Nickel
Leak Integrity - <1 x 10-9 Pa·m3/s (He)
Heater Power Requirements - 220 VAC, 60 Hz, 2400W
Carrier Gas - Inert gas recommended
Max Carrier Gas Flow1 - 30 standard liters/min N2 at 80 psig
20 standard liters/min N2 at 50 psig
Max. Liquid Flow Rate2 - 6,000 g/hr. (TEOS equivalent)
600 g/hr. (H2O or equivalent)
System Pressure Limit - 150 psig
Compressed Air - 90 to 110 psi
Temperature Range - 40°C to 200°C
Vaporizer Body - Vacuum tight chamber with multi-stage heat exchanger, SS 316 construction
Temperature Sensor - 2 Type K thermocouples
Specifications subject to change without notice
1 Max Carrier Gas Flow Rate is adjustable; visit www.tsi.com/contact to request more information.
2 Max Liquid Flow Rate is process dependent. The spec assumes a vaporizer temperature of 180° C or higher, N2 carrier gas flow ≥20 SLPM, and pressure <10 Torr immediately downstream of the vaporizer.