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Laboratory vaporizer Turbo II 2855PE

Laboratory vaporizer - Turbo II 2855PE - MSP, a Division of TSI
Laboratory vaporizer - Turbo II 2855PE - MSP, a Division of TSI
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Characteristics

Applications
laboratory

Description

MSP's Turbo II™ Vaporizer 2855PE is designed for high-precision microelectronic applications that require mid to high vapor flow rates. Based off of the field proven, highly reliable, and low-maintenance MSP Turbo™ Vaporizers, the new 2855PE delivers twice the vapor output in a footprint that is half the size. Product Details Dimensions (HxWxD) - 236 mm x 84 mm x 142 mm (9.3'' x 3.3'' x 5.6'') Weight - 5.2 kg (11.5 lb) Fittings (on the unit) - Carrier Gas Inlet - 1/4 in. VCR female split nut Liquid Inlet - 1/8 in. VCR female Vapor Outlet - 1/4 in. VCR female Compressed Air - 4 mm instant tube fitting Wetted Parts - SS 316, PEEK, Elgiloy®, Nickel, PCTFE Leak Integrity - ≤ 1x 10-8 Pa·m3/s Helium Heater Power Requirements1 - 208 VAC, 60 Hz, 900 W Carrier Gas - Inert gas recommended Max Carrier Gas Flow1 - 10 standard liters/min N2 @ 50 psig Max Liquid Flow2 - 40 g/min (TEOS or equivalent) System Pressure Limit - 150 psig Compressed Air - 90 to 110 psig Temperature Range3 - 40°C to 200°C Temperature Sensor - 2 type K thermocouples Accessories - Power cable included (3 m). AMP CPC, 4 pin connector with 3 flying leads on opposite end Specifications subject to change without notice. 1 Max Carrier Flow, Heater Power (W) and Line Voltage are factory adjustable, visit www.tsi.com/contact to request more information. 2 Max. liquid flow is process dependent. The spec assumes a vaporizer temperature of 200°C, max. carrier gas flow and pressure <50 Torr immediately downstream of the vaporizer.. 3 Appropriate venting is required.

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