Laboratory vaporizer Turbo II 2852PE

MSP's Turbo II™ Vaporizer 2852PE is designed for high-precision microelectronic applications that require low to mid vapor flow rates. Based off of the field proven, highly reliable, and low maintenance MSP Turbo™ Vaporizers, the new 2852PE provides stable vapor concentrations while maintaining a very small footprint. The 2852PE also features an on-board flow control valve for extremely fast flow-rate response. Product Details Dimensions (HxWxD) - 198 mm x 84 mm x 114 mm (7.8'' x 3.3'' x 4.5'') Weight - 2.5 kg (5.6 lb) Fittings (on the unit) - Carrier Gas Inlet - 1/4 in. VCR female split nut Liquid Inlet - 1/8 in. VCR female Vapor Outlet - 1/4 in. VCR female split nut Compressed Air - 4 mm instant tube fitting Wetted Parts - SS 316, PEEK, Elgiloy®, Nickel Leak Integrity - ≤ 1x 10-8 Pa·m3/s Helium Heater Power Requirements1 - 208 VAC, 60 Hz, 450 W Carrier Gas - Inert gas recommended Max Carrier Gas Flow1 - 2.0 standard liters/min N2 @ 50 psig Max Liquid Flow2 - 7 g/min (TEOS or equivalent) System Pressure Limit - 150 psig Compressed Air - 90 to 110 psig Temperature Range3 - 40°C to 180°C Temperature Sensor - 2 type Ƙ thermocouples Accessories - Power cable included (3 m). AMP CPC, 4 pin connector with 3 flying leads on opposite end Specifications subject to change without notice. 1 Max Carrier Flow, Heater Power (W) and Line Voltage are factory adjustable, visit www.tsi.com/contact to request more information. 2 Max. liquid flow is process dependent. The spec assumes a vaporizer temperature of 180°C, max. carrier gas flow and pressure <50 Torr immediately downstream of the vaporizer. 3 Appropriate venting is required.