Product descriptionD385S valve with pneumatic actuator is designed to maintain the highest level of gas purity. Its tied diaphragm technology minimizes particle generation and contamination risk. The D385S is intended for ultra-high purity (UHP), corrosive, reactive and toxic gases commonly encountered in the electronics and semiconductor industry.
Key advantages- Reduced dead space and gas-wetted volumes allow efficient purging
- Pneumatic actuation prevents gas contact with the valve operating mechanism, avoiding seizure
- Back-up welded diaphragms provide a permanent, gas-tight seal
- Burst disc materials: Nickel, AISI 316L
SpecificationsGas type: Corrosive, reactive and toxic ultra-high purity gases
Connections: According to (inter-)national standards and customer specifications
Flow rate: CV = 0.35
Working pressure: 200 bar
Body materials: Stainless steel 1.4435 (AISI 316L), Hastelloy® C22, Nickel 200, Monel® 2.4375 (Monel 500 K)
Temperature range: -40 to +65 °C
Leak rate: 1·10^-8 mbar·L/s
Seat orifice size: 4 mm
Marking: π0029 (according to TPED), 3 stars, valve number, manufacturing date
Technical specifications- Model: D385S
- Intended gases: Corrosive, reactive and toxic ultra-high purity gases
- Flow coefficient (CV): 0.35
- Maximum working pressure: 200 bar
- Body materials: AISI 316L (1.4435), Hastelloy C22, Nickel 200, Monel 2.4375
- Temperature range: -40 to +65 °C
- Leak rate: 1·10^-8 mbar·L/s
- Seat orifice: 4 mm
- Burst disc materials: Nickel, AISI 316L
- Marking: π0029 (TPED), 3 stars, valve number and manufacturing date