Climate chamber

thermostatictemperaturehumidity

Application
Circulates clean air and controls humidity to eliminate environmental fluctuations at installation sites for equipment requiring dimensional stability, position accuracy and fine measurement. Custom configurations available to match internal equipment and customer requirements.

Key features

• Cleanliness: ISO Class 4 (Class 10).
• Temperature control precision from ±0.1°C to ±0.005°C.
• Can be tailored to accommodate built-in devices.
• Multiple protective circuits for enhanced safety.
• Provides a high-cleanliness, high-precision temperature and humidity environment to prevent particle/gas adhesion and thermal expansion/contraction that cause product defects.
• Humidity control: standard 40–60% RH; optional low-humidity 5–40% RH.
• PID control, ultra-precision components and airflow design matched to temperature accuracy; temperature fluctuation capability from 0.1°C to 0.002°C depending on configuration.

Standards & specifications
C-Type (Enclosure)
• Ideal for length measurement systems and steppers.
• Composed of an air-conditioning unit with humidity control, blower and HEPA filters, and a working chamber.
• Chamber options: automatic shutters (electric or pneumatic), observation windows for internal device operation checks, maintenance doors.
• Available in vertical laminar flow (HEPA on ceiling) and horizontal laminar flow (HEPA on side) layouts.

B-Type (Open)
• For projection aligners.
• Open-type unit integrating a temperature-controlled air-conditioning unit at the rear of a vertical laminar flow clean bench.
• Small footprint and easy mobility with optional casters.

S-Type (Separated)
• Suitable for electron-beam writing equipment and small devices with processing airflow ≤50 m/min.
• Ducted configuration separates the air-conditioning unit from the chamber to isolate noise, vibration and electromagnetic interference.
• Internal devices can be accessed from front, both sides and rear.
• Also available in a circulation type with duct-connected intake and working area.

Main applications
Semiconductor manufacturing: steppers (reduction projection exposure), aligners, electron-beam writers
Display panel manufacturing: LCD, plasma displays, FED
Precision processing: mirror polishers, laser processors, magnetic-head cutters, precision lens polishers, spin coaters for CD-R/DVD-R
Precision measuring instruments: precision length gauges, 2D/3D measuring machines
Biological: precision microscopes, handling of samples sensitive to temperature/humidity changes

Technical highlights

• Cleanliness: ISO Class 4 (Class 10)
• Temperature control accuracy: ±0.1°C to ±0.005°C (configurable up to 0.1°C–0.002°C)
• Humidity control: standard 40–60% RH; low-humidity option 5–40% RH
• Control method: PID
• Air-conditioning: humidity control mechanism, blower, HEPA filters (vertical or horizontal laminar flow)
• Configuration types: C (enclosure), B (open), S (separated)
• Safety: multiple protective circuits
• Custom design options: observation window, automatic shutter, maintenance door, caster mobility