Schottky FE-SEMs for both ultra high-resolution imaging and analytical work
Ideal for users who want both ultra high-resolution imaging and analytical capabilities.
Analytical working distance of just 6 mm.
Display up to six image channels in parallel using a dual monitor user interface.
Variable-pressure capabilities without needing extra apertures enable imaging and analytical work on non-conductive specimens.
Advanced automation for streamlined workflows.
Schottky field emission source. Full range beam boosting and an electrostatic-magnetic hybrid objective lens for sub-nanometer resolution without magnetic sample interaction.
Larger chamber. Accommodates specimens up to 200mm in diameter and 80mm in height.
18 chamber access ports, including two cabling ports in the stage door, for optional accessories.
Optimized for fast (high throughput) inspection of specimens up to 150mm in diameter.
Load samples through a standard six-inch specimen exchange chamber, eventually with an optional inert-gas transfer mechanism.
Overview
The SU7000 and SU8700 FE-SEMs from Hitachi offer an exceptional balance between ultra high-resolution imaging and analytical capabilities. Designed for both, these two instruments share the same high-performance electron optics and analytical features, but come with different chamber and stage sizes.
The SU7000 and SU8700 are built to handle a wide range of applications. Their high brightness Schottky field emission electron source, single-scan multi-signal imaging ability, and optional workflow automation (using the EM Flow Creator software) ensure consistent results and superior productivity.