CFE-SEM microscope SU8600

for research3Dfloor-standing

The SU8600 brings in a new era of Ultrahigh-Resolution cold-field emission scanning electron microscopes to the long-standing Hitachi EM lineup. This revolutionary CFE-SEM platform incorporates multifaceted imaging, automation, increased system stability, efficient workflows for users of all experience levels, and more. Features Electron Optics and Detectors Core Technology （Cold FE Electron Source） From the time that the cold field emission (CFE) electron source was realized in 1972, Hitachi High Tech has constantly improved this outstanding technology for high-resolution electron imaging. The latest developments in electron gun designs yield higher irradiation stability of the electron beam within the high-brightness region. The SU8600 enables high S/N imaging even at low accelerating voltages, and can also be used in long-term measurements and analyses under large current irradiation conditions rivaling other gun technologies available. Core Technology (ExB) Efficient detection of secondary electrons (SE) without changing the trajectory of the primary electrons is possible by forming a mutually orthogonal electric field and magnetic field (ExB field) above the objective lens. This core technology makes it possible to obtain images with excellent S/N and contrast, even at the smallest probe current conditions often used for high-resolution imaging. Core Technology (SuperExB) The advancement in design to enact SuperExB signal mixing function is one of the signature technologies of Hitachi High- Tech. The electrons (secondary electrons, SEs, or backscattered electrons, BSEs)