The SLS Syringe Liquid Particle Sampler from Particle Measuring Systems uses a precision syringe and simple flow-path for delivering chemical samples from a sample vessel or chemical container, directly to the particle sensor. It is ideal for applications where precise, small-volume particle batch sampling is required, where the sampler device cannot contribute contamination to the chemical sample.
The system consists of a selectable syringe for either corrosive or non-corrosive liquids, a selectable particle counter for different sizing sensitivities, and batch-sampling software.
Menu-driven data collection – 1, 5, 10 and 25 ml
Wetted materials compatible with corrosive chemicals
Compact design with on-board particle sensor
Precise particle measurement
Versatile – select various particle sensors and syringe sizes
Small sample volume – eliminates sample waste
Diverse applications in semiconductor and process chemical manufacturing
Incoming quality measurement of process chemicals
Point-of-process monitoring on process tools
Testing and qualification of chemical components
Outgoing chemical qualification testing
Mechanical parts cleanliness testing