The RX3000 is a single-stage free-diaphragm pressure regulator specially designed for high-purity and ultra-high-purity applications. Its single-stage design provides an excellent flow stability, and its threadless design guarantees the highest level of purity.
Key advantages
Unique threadless design in all versions for a higher purity level
Optimized supply pressure effect and excellent flow stability
Life duration according to CGA E4
Assembling, testing & packaging in cleanroom: Class ISO 4
Individual serial number for full traceability
Electropolished surface per SEMI F19 UHP Grade
UHP Material - Semi F20 option available
Specifications
Temperature range -20°C to +65°C (-4°F to +149°F)
Regulator type Free diaphragm
Burst pressure 300% of operating pressure
Proof pressure 150% of operating pressure
Certified max. helium inboard leak rate (at max. pressure) ≤ 1 x 10-9 mbar.l/s
Certified max. helium across the seat leak rate (at max. pressure) - ≤ 1 x 10-8 mbar.l/s
Certified max. helium outboard leak rate ≤ 1 x 10-9 mbar.l/s