Clean room thermostat Semistat S 1200

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Overview
Point-of-use (POU) thermoelectric process thermostat designed for precise temperature control in semiconductor and cleanroom processes. Reduces energy consumption compared with compressor-based systems and can be installed underfloor at the point of use to minimize cleanroom footprint. Controls process temperature profiles to ±0.1 °C for improved wafer-to-wafer homogeneity.

Features

• Thermoelectric process thermostat with low energy consumption
• Quiet, low-vibration operation using refrigerant-free cooling technology
• No filters or DI components required
• Connection for CDA (clean dry air) purge to prevent condensation
• Use of perfluorinated heat transfer fluids
• Available in water-cooled configuration
• Compact dimensions and low weight for point-of-use installation
• Extremely low internal volume of heat transfer liquid
• Compliant with SEMI S2 and F47 standards

Working range

• Minimum working temperature: −20 °C
• Maximum working temperature: 90 °C
• Temperature stability: ±0.1 K

Cooling capacity (examples)
Temperature — Cooling capacity 50 Hz — Cooling capacity 60 Hz
20 °C — 1.2 kW — 1.2 kW
10 °C — 0.9 kW — 0.9 kW
0 °C — 0.6 kW — 0.6 kW
−10 °C — 0.35 kW — 0.35 kW
−20 °C — 0.08 kW — 0.08 kW

Technical data (according to DIN 12876)

• Working temperature range: −20 ... 90 °C
• Temperature stability: ±0.1 K
• Minimum heater power: 3 kW
• Minimum filling volume: 1 L
• Maximum filling volume: 1.3 L
• Dimensions (WxDxH): 116 x 232 x 470 mm
• Weight: 15 kg
• Power supply: connection to PSC