Clean room thermostat Semistat S 4400

processcompactwithout display

Product description
Point-of-use (POU) thermoelectric process thermostat for precise control of process temperatures in semiconductor and cleanroom applications. Reduces energy consumption by up to 90% compared with compressor-based systems. Compact footprint with optional underfloor installation to minimize cleanroom use. Precise temperature control to ±0.1 °C improves wafer-to-wafer homogeneity.

Features

• Thermoelectric process thermostat with low energy consumption
• Quiet, low-vibration operation due to refrigerant-free cooling technology
• No filters or DI components required
• Connection for purge with clean dry air (CDA) to prevent condensation
• Use of perfluorinated heat transfer fluids
• Available water-cooled variant
• Compact overall size and low weight
• Extremely low volume of heat transfer liquid
• SEMI S2 and F47 compliant

Working range

• Min. working temperature: -20 °C
• Max. working temperature: 90 °C
• Temperature stability: 0.1 ± K

Technical data (according to DIN 12876)

• Working temperature range: -20 ... 90 °C
• Temperature stability: 0.1 ± K
• Heater power (min.): 12 kW
• Min. filling volume: 2.5 L
• Max. filling volume: 2.8 L
• Dimensions (WxDxH): 194 x 300 x 560 mm
• Weight: 38 kg
• Power supply: Connection to PSC
• Cooling technology: thermoelectric / refrigerant-free cooling (water-cooled variant available)
• Compliance: SEMI S2 and F47

Cooling capacity
20 °C | 4.4 kW (50 Hz / 60 Hz)
10 °C | 3.5 kW (50 Hz / 60 Hz)
0 °C | 2.6 kW (50 Hz / 60 Hz)
-10 °C | 1.65 kW (50 Hz / 60 Hz)
-20 °C | 0.7 kW (50 Hz / 60 Hz)

Downloads (available documents)
Data sheet Semistat S 4400
Operating manual Semistat (Point of Use)
Brochure: Semistat / Circulation and process thermostats

Technical specifications

• Commercial name / model: Semistat S 4400
• Part no.: L003278
• Working temperature range: -20 ... 90 °C
• Temperature stability: 0.1 ± K
• Heater power (min.): 12 kW
• Filling volume (min./max.): 2.5 L / 2.8 L
• Dimensions (WxDxH): 194 x 300 x 560 mm
• Weight: 38 kg
• Cooling technology: thermoelectric / refrigerant-free cooling (also water-cooled variant)
• Compliance: SEMI S2 and F47