Process thermostat Semistat S 2400

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Product description
Point-of-use (POU) temperature control system designed for precise process temperature management in semiconductor and laboratory environments. POU operation reduces energy consumption by up to 90% versus compressor-based chillers and allows compact installation close to the process, including underfloor mounting to minimize cleanroom footprint. Quick, stable control to ±0.1 °C improves wafer-to-wafer homogeneity and process repeatability.

Features

• Thermoelectric process thermostat with low energy consumption
• Quiet, low-vibration operation using refrigerant-free cooling technology
• No filters or DI components required for the cooling circuit
• Purge connection for clean dry air (CDA) to prevent condensation
• Designed for use with perfluorinated heat transfer fluids
• Water-cooled system for stable thermal performance
• Compact footprint and low system weight
• Extremely low internal volume of heat transfer liquid
• Compliant with SEMI S2 and F47 standards

Working range

• Minimum working temperature: -20 °C
• Maximum working temperature: 90 °C
• Temperature stability: ±0.1 K

Cooling capacity (table)
Temperature | Cooling capacity 50 Hz | Cooling capacity 60 Hz
20 °C | 2.45 kW | 2.45 kW
10 °C | 1.93 kW | 1.93 kW
0 °C | 1.4 kW | 1.4 kW
-10 °C | 0.88 kW | 0.88 kW
-20 °C | 0.35 kW | 0.35 kW

Accessories (examples)

• Filling canister

Technical specifications

• Working temperature range: -20 ... 90 °C
• Temperature stability: ±0.1 K
• Heater power min.: 6 kW
• Min. filling volume: 1.25 L
• Max. filling volume: 1.6 L
• Dimensions (WxDxH): 116 x 300 x 560 mm
• Weight: 27 kg
• Net weight: 26.81 kg
• Power supply: Connection to PSC